ctrlX AUTOMATION offers the most flexible and configurable Automation Kit for Wafer Handling
Bosch Rexroth offers a modular software and hardware solution sets for wafer handling systems, which can be easily integrated in equipment or standalone robots in semiconductor industry. The solution sets rely on open standards and interfaces provide high degree of freedom and customizing possibilities.
Benefits of ctrlX AUTOMATION Solutions for Wafer Handling
HIGH PERFORMANCE: SPEED, DYNAMIC & ACCURCY increasing machine efficiency
SMOOTH VIRBRATION - & JERK - FREE MOTION: ensure a high wafer quality by using CAPE- Cognibotics Algorithmic Performance Enhancing App for intelligent vibration damping
OPEN MOTION CORE & API for your unique robot or handling system: customize, extend or exclusively implement your own kinematics or motion, setting up on the complete MOTION functionality
Supported kinematics/robots: Cartesians and Gantry Systems, SCARA, Delta, articulated (6-axis robots with spherical hand)
stay owner of your IP and benefit from standard ctrlX mechanisms like update, service, licensing, backup store, user management
Combine openess, features and benefits of ROS & ROS2 and ctrlX AUTOMATION
by using the ctrlX CORE as a ROS2 robot controller, of of a robotic cell or of a mobile robot
with many other ctrlX ecosystem extras,
e.g. VISION (classic or AI-based machine vision) with ready to use APPs:HD VISION for SHAPE DETECTION, QUALITY INSPECTION, OBJECT DETECTION or PICK & PLACE
xis.ai for SAFETY RISKS MONITORING, VISUAL QUALITY CONTROL AND DEFECT DETECTION or ASSEMBLY VERIFICATION
36ZERO for SURFACE QUALITY INSPECTION
NEXEED INTEGRATED VISION: lightweight service and framework for developing and executing of machine vision applications
INDUSTRY SPECIFIC
LINUX based platform as the SEMICON industry is
STANDARDS CONFORMITY:
SEMI S1, S2/S8, S10, S14, E10, F47, E187;
ISO 13849, DIN IEC 61800-3, EN 60204-1, NFPA 79, UL 508 A
RESILIENT ctrlX OS is Cyber Resilience Act Ready and compliant to IEC62443-4-2 SL2
UNIFORM & OPEN ARCHITECTURE for endless flexibility and innovativeness
SHORTEN TIME-to-MARKET, e.g. by easy-to-use Engineering, low-code Programming by IDE and 3D Viewer or Model Connect App,… etc.
FUTURITY, e.g. innovate incrementally by additional APPs and further ctrlX development
READY for MODULAR MACHINE DESIGN
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[accordion-item title="AC 400V Wafer Handling & Robot Solution"]
AC 400V Wafer Handling & Robot Solution: highly efficient – robust – high power range
suitable for
excellent efficiency at high power levels (few kW up to > 100kW)
large machines and robots, long-distance installation
optimized cooling/heat release especially with option “liquid cooling” for motors
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Configuration Example
Wafer Handling & Robot Solution | AC 400V | CTRLX480283[link-button type="secondary" text="Open configuration" target="_blank" href="https://ctrlx-configurator-platform.boschrexroth.com/#/solution/load/CTRLX480283/4c71e5dc-c3c4-4e3f-b278-646914d3174f"]
[accordion-item title="AC 200/230V Wafer Handling & Robot Solution"]
AC 200/230V Wafer Handling & Robot Solution: compact - easy safety (touch protection) – mid power range
suitable for
compact solutions of very good efficiency at higher power levels (few 100 W to approx. 15 kW)
smaller to medium machines and robots, standalone & integrated handling
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Configuration Example
Wafer Handling & Robot Solution | AC 200/230V | CTRLX213608[link-button type="secondary" text="Open configuration" target="_blank" href="https://ctrlx-configurator-platform.boschrexroth.com/#/solution/load/CTRLX213608/dddc1b4e-e299-4b25-88c3-27cd806cecc9"]
[accordion-item title="DC 48V Wafer Handling & Robot Solution "]
DC 48V Wafer Handling & Robot Solution: compact – safe – low power range
suitable for
compact and efficient solutions at low power levels (few W to few kW)
load cycles with low torque and high speed
close installation of drive and motor
small machines and robots, standalone & integrated handling
Note: Configuration example for the 48V Technology will be expectedly published in 07.2026, as some of the components of this Solution Set are not depicted yet in ctrlX Configurator. In the meantime please feel free to contact us for a product demo.
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