Wafer handling robots in semiconductor manufacturing must transport silicon wafers through complex production processes with extreme precision while maintaining ultra-clean conditions. The industry faces critical challenges including contamination risks from particle generation, vibration-induced damage to delicate wafers, micrometer-level positioning requirements, and seamless integration with existing fab equipment such as EFEMs, load ports, metrology, testing and inspection tools. Additional requirements include compliance with strict SEMI and ISO safety standards and reliable 24/7 operation of the highest productivity.
The ctrlX AUTOMATION solution addresses these challenges through a comprehensive automation platform centered on ctrlX COREplus with integrated motion running ctrlX OS, PLC, and connectivity functions. ctrlX MOTION coordinates multi-axis control supporting SCARA, Frog-Leg, Articulated, and Cartesian kinematics for precise wafer transfers. ctrlX DRIVE with MS2N/MS2M motors delivers dynamic, low-vibration movements, while oversampling-capable ctrlX I/O modules enable rapid reaction times crucial for Active Wafer Centering (AWC) and tight sensor-actuator synchronization. Furthermore, the vibration damping app of ctrlX World partner Cognibotics minimizes oscillations during transport, protecting wafer quality.
Open interfaces (OPC UA, EtherCAT) and SEMI S1/S2/S8/S10/S14/E10/F47/E187 compliance ensure seamless integration into existing fab infrastructure. Moreover, the Linux-based ctrlX OS ecosystem supports Vision AI apps for vision guided robotics, object detection, quality control, in-line defect detection and process optimization. The ctrlX Data Layer streamlines diagnostics and scalability, while ctrlX SAFETY and IEC 62443-certified security insures compliant, continuous and resilient operation. ctrlX OS enables Vision AI apps
Key Features and Benefits
Micrometer-Class Precision with Vibration Control
Smooth, coordinated multi-axis motion control combined with intelligent vibration control, damping and filtering achieves consistent positioning accuracy and shortened settling times for damage-free wafer handling.Cleanroom-compatible operation and contamination prevention
Low-vibration drive technology with coordinated kinematics and additional vibration damping app minimizes particle shedding during motion.Open Fab-Ready Integration and Industry Standards Compliance
Standardized interfaces and data access, API for custom motion incl. kinematics, and adherence to the relevant SEMI standards enable seamless and cybersecure fab integration, data orchestration and IP protection.
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